Vacuum chuck
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Key Features
- Rotatable sample area 200 mm in diameter for full 8″ wafer
- Motorized rotation by stepper motor and tooth belt
- Top shower plate exchangable for different wafer thicknesses
- Pumping, venting and locking are contolled by software
- Complete setup with contoller, diaphragm pump and tubings
- Fits to G200 Nanoindenter sample tray
- Whole wafers can be measured without re-mounting
Application
Vacuum chuck with controller and vacuum pump
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Control software interface
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- Automated wafer tests
- Quality control
