Complex evaporator module

UHV Deposition and Analysis Chambers from SURFACE

SURFACE can provide a range of UHV deposition, analysis, and transfer chambers according to your needs. These can be stand-alone systems, or the chambers can be integrated into a cluster system based on the SURFACE Laser Star cluster design.

Examples of Installed SURFACE Custom Systems

• Temperature-dependent surface wetting analysis chamber (Technion, Haifa)
• Complex deposition/evaporator system connected to an existing ESCA/XPS (TU Darmstadt)
• Sputter deposition and 4" wafer curvature stress measurement cluster (Cornell University, Ithaca)
• Hydrogen plasma cleaning system for 4" Si wafers (Fernuniversität Hagen)
• Ion beam sputtering of radioactive samples, sample film tape sealing system (RWTH Aachen)

Examples of other UHV systems built by SURFACE in connection with our Laser Star cluster:

• Sputtering systems
• Evaporator systems with several low- or high-temperature evaporation sources/effusion cells
• e-Beam evaporators
• Chambers for UHV-AFM and STM
• Chambers for XPS/ESCA
• Specialized transfer modules to hand over samples to additional systems by other manufacturers
• Transfer tunnels to move samples between different systems

The SURFACE customized UHV modules are designed based on your requirements, so please contact us for more information.